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  ※ Implanter


  ※ E-beam


         Hydrogen Ion Implanter

         E-beam Lithography System

 

 

  ※ Photo


  ※ Sputter


         Contact Aligner

         12" Multi Chamber Cluster Sputtering System

         Sputter

 

 

  ※ Evaporator


  ※ RTA


         Thermal Evaporator

         Rapid Thermal Annealer

 

 

  ※ Furnace


  ※ Oven


         12" Magnetic Vacuum Annealing Oven

         Furnace (Oxidation)

         Furnace (POCl3)

         Box Furnace

         Vacuum Oven

 

 

  ※ CMP


  ※ Centrifuge


         CMP Polisher I

         CMP Polisher II

         High Speed Centrifuge

 

 

  ※ Solar Cell


  ※ 측정/분석


         Screen Printer

         Solar Simulator

         Vibrating Sample Magnetometer

         4-point Probe

         Ellipsometer

         ELS

         UV-Vis-NIR Spectrophotometer

         Focused Ion Beam

 

Recent Update: JAN. 26, 2016